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Browsing by Author "Ramanathan, Vidya"

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    Resolution improvement and dose reduction in logic and memory applications from low NA to high NA

    Das, Shubhankar  
    ;
    Blanco, Victor  
    ;
    Van Tuong Pham
    ;
    Jambaldinni, Shruti
    ;
    De Silva, Anuja
    Proceedings paper
    2025, 2025 Conference on Optical and EUV Nanolithography, FEB 24-27, 2025

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