Publication:

Resolution improvement and dose reduction in logic and memory applications from low NA to high NA

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051512
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Author(s)

Das, Shubhankar  
;
Blanco, Victor  
;
Pham, Van Tuong  
;
Jambaldinni, Shruti
;
De Silva, Anuja
;
Franke, Joern-Holger  
;
Newman, Marcus  
;
Haider, Ali
;
Gallagher, Matt  
;
Lee, Jeonghoon  
;
Sah, Kaushik
;
Chen, Zhijin
;
Cheng, Bobo
;
Gong, Chenwei
;
Ramanathan, Vidya
;
Cross, Andrew
;
Gillijns, Werner  
;
Suh, Hyo Seon  
;
Foubert, Philippe  
;
Petersen, John  
;
Vanelderen, Pieter  
;
Vandenberghe, Geert  
;
Ronse, Kurt  
;
Halder, Sandip  
;
Leray, Philippe  

Journal

Proceedings of SPIE

Abstract

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42 since deposited on 2025-07-31
Acq. date: 2026-02-27

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42 since deposited on 2025-07-31
Acq. date: 2026-02-27

Citations