Publication:

Resolution improvement and dose reduction in logic and memory applications from low NA to high NA

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3051512
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dc.contributor.authorDas, Shubhankar
dc.contributor.authorBlanco, Victor
dc.contributor.authorPham, Van Tuong
dc.contributor.authorJambaldinni, Shruti
dc.contributor.authorDe Silva, Anuja
dc.contributor.authorFranke, Joern-Holger
dc.contributor.authorNewman, Marcus
dc.contributor.authorHaider, Ali
dc.contributor.authorGallagher, Matt
dc.contributor.authorLee, Jeonghoon
dc.contributor.authorSah, Kaushik
dc.contributor.authorChen, Zhijin
dc.contributor.authorCheng, Bobo
dc.contributor.authorGong, Chenwei
dc.contributor.authorRamanathan, Vidya
dc.contributor.authorCross, Andrew
dc.contributor.authorGillijns, Werner
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorFoubert, Philippe
dc.contributor.authorPetersen, John
dc.contributor.imecauthorDas, Shubhankar
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorVan Tuong Pham
dc.contributor.imecauthorFranke, Joern-Holger
dc.contributor.imecauthorNewman, Marcus
dc.contributor.imecauthorGallagher, Matt
dc.contributor.imecauthorLee, Jeonghoon
dc.contributor.imecauthorGillijns, Werner
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorFoubert, Philippe
dc.contributor.imecauthorPetersen, John
dc.contributor.imecauthorVanelderen, Pieter
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorRonse, Kurt
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorLeray, Philippe
dc.contributor.orcidimecDas, Shubhankar::0000-0003-1830-1226
dc.contributor.orcidimecBlanco, Victor::0000-0003-4308-0381
dc.contributor.orcidimecFranke, Joern-Holger::0000-0002-3571-1633
dc.contributor.orcidimecNewman, Marcus::0000-0002-3912-6343
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.contributor.orcidimecSuh, Hyo Seon::0000-0003-4370-5062
dc.contributor.orcidimecPetersen, John::0000-0003-4815-3770
dc.contributor.orcidimecVanelderen, Pieter::0009-0008-3347-0072
dc.contributor.orcidimecVandenberghe, Geert::0009-0001-2424-1322
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.date.accessioned2025-07-31T04:00:03Z
dc.date.available2025-07-31T04:00:03Z
dc.date.issued2025
dc.description.wosFundingTextThis work has been enabled in part by NanoIC pilot line. The acquisition and operation are jointly funded by the Chips Joint Undertaking, through the European Union's Digital Europe (101183266) and Horizon Europe Programs (101183277) as well as by the participating states Belgium (Flanders), France, Germany, Finland, Ireland and Romania. For more information, visit nanoic-project.eu. Authors also thank ASML.
dc.identifier.doi10.1117/12.3051512
dc.identifier.eisbn978-1-5106-8635-9
dc.identifier.isbn978-1-5106-8634-2
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45991
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1
dc.source.conference2025 Conference on Optical and EUV Nanolithography
dc.source.conferencedate2025-04-22
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages12
dc.title

Resolution improvement and dose reduction in logic and memory applications from low NA to high NA

dc.typeProceedings paper
dspace.entity.typePublication
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