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Browsing by Author "Rangarajan, Srinivasan"

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    Plasma halogenated amorphous carbon as growth inhibiting layer for area-selective deposition of titanium oxide

    Krishtab, Mikhail  
    ;
    Hung, Joey  
    ;
    Koret, Roy
    ;
    Turovets, Igor
    ;
    Shah, Kavita
    ;
    Rangarajan, Srinivasan
    Proceedings paper
    2020, Metrology, Inspection, and Process Control for Microlithography XXXIV, 23/02/2020, p.113250Y

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