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Browsing by Author "Ranson, P."

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    Applications of cryogenic plasma etching for microtechnology and advanced CMOS manufacturing

    Dussart, R.
    ;
    Lefaucheux, P.
    ;
    Tillocher, T.
    ;
    Ranson, P.
    ;
    Boufnichel, M.
    ;
    Ljazouli, R.
    ;
    Zhang, Liping  
    Meeting abstract
    2013, Plasma Etch and Strip in Microtechnology - PESM, 14/03/2013

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