Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Rao, V. S."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Modelling calibration and validation of contributions to stress in the STI process sequence

    Garikipati, K.
    ;
    Rao, V. S.
    ;
    Hao, M. Y.
    ;
    Ibok, E.
    ;
    De Wolf, Ingrid  
    ;
    Dutton, R. W.
    Proceedings paper
    1999, 2nd International Modeling and Simulations of Microsystems Conference, 19/04/1999, p.180-183

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings