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Modelling calibration and validation of contributions to stress in the STI process sequence
Publication:
Modelling calibration and validation of contributions to stress in the STI process sequence
Date
1999
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Garikipati, K.
;
Rao, V. S.
;
Hao, M. Y.
;
Ibok, E.
;
De Wolf, Ingrid
;
Dutton, R. W.
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1907
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-09
Citations
Metrics
Views
1907
since deposited on 2021-10-06
1
last month
Acq. date: 2025-12-09
Citations