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Browsing by Author "Rasadujjaman, Md"

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    Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films

    Rasadujjaman, Md
    ;
    Nakamura, Y
    ;
    Watanabe, M
    ;
    Kondoh, E
    ;
    Baklanov, Mikhaïl
    Journal article
    2016, Microelectronic Engineering, 153, p.5-10

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