Browsing by Author "Rathsack, Ben"
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Publication Addressing the challenges of Directed Self Assembly implementation
Proceedings paper2011, International Symposium on Lithography Extensions, 20/10/2011Publication Comparison of directed self-assembly integrations
Proceedings paper2012, Advances in Resist Materials and Processing Technology XXIX, 12/02/2012, p.83250GPublication EUV RLS performance tradeoffs for a polymer bound PAG resist process
Proceedings paper2009, International Symposium on Extreme Ultraviolet Lithography, 18/10/2009Publication Finite element modeling of PAG leaching and water uptake in immersion lithography resist materials
Proceedings paper2008, Advances in Resist Materials and Processing Technology XXV, 24/02/2008, p.692315Publication Image contrast contributions to immersion lithography defect formation and process yield
Proceedings paper2008, Optical Microlithography XXI, 24/02/2008, p.69244WPublication World-wide standardization effort on leaching measurement methodology
Proceedings paper2007, 4th International Symposium on Immersion Lithography, 8/10/2007