Browsing by Author "Ren, Jiaxing"
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Publication Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions
Proceedings paper2018, Novel Patterning Technologies 2018, 25/02/2018, p.105840KPublication Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions
Journal article2018, Journal of Micro/Nanolithography MEMS and MOEMS, (17) 3, p.31203