Publication:

Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

Date

2018
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

40365.pdf 4.31 MB

Author(s)

Zhou, Chun
;
Kurosawa, Tsuyoshi
;
Dazai, Takahiro
;
Doise, Jan  
;
Ren, Jiaxing
;
Bezik, Cody
;
Segal-Peretz, Tamar
;
Gronheid, Roel  
;
Rincon Delgadillo, Paulina  
;
Yamazaki,, Akiyoshi
;
de Pablo, Juan
;
Nealey, Paul

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Abstract

Description

Statistics

Views

1903 since deposited on 2021-10-26
1last month
1last week
Acq. date: 2026-02-26

Citations

Statistics

Views

1903 since deposited on 2021-10-26
1last month
1last week
Acq. date: 2026-02-26

Citations