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    Spatial frequency breakdown of CD variation

    Kovalevich, Tatiana  
    ;
    Witek, Barbara
    ;
    Riggs, Daniel
    ;
    Bekaert, Joost  
    ;
    Van Look, Lieve  
    Proceedings paper
    2022, 37th European Mask and Lithography Conference, 2022-06-20, p.Art. 124720H

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