Publication:

Spatial frequency breakdown of CD variation

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2640808

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Files

Published version 1.36 MB

Author(s)

Kovalevich, Tatiana

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;

;

;

Van Look, Lieve

;

Maslow, Mark John

Journal

Proceedings of SPIE

Metrics

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Acq. date: 2026-01-06