Publication:

Spatial frequency breakdown of CD variation

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2640808
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Published version 1.36 MB

Author(s)

Kovalevich, Tatiana  
;
Witek, Barbara
;
Riggs, Daniel
;
Bekaert, Joost  
;
Van Look, Lieve  
;
Maslow, Mark John

Journal

Proceedings of SPIE

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