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Spatial frequency breakdown of CD variation
Publication:
Spatial frequency breakdown of CD variation
Date
2022
Proceedings Paper
https://doi.org/10.1117/12.2640808
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1.36 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kovalevich, Tatiana
;
Witek, Barbara
;
Riggs, Daniel
;
Bekaert, Joost
;
Van Look, Lieve
;
Maslow, Mark John
Journal
Proceedings of SPIE
Abstract
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244
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1201
since deposited on 2022-12-11
408
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Citations
Metrics
Downloads
244
since deposited on 2022-12-11
115
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Views
1201
since deposited on 2022-12-11
408
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations