Publication:

Spatial frequency breakdown of CD variation

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2640808
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dc.contributor.authorKovalevich, Tatiana
dc.contributor.authorWitek, Barbara
dc.contributor.authorRiggs, Daniel
dc.contributor.authorBekaert, Joost
dc.contributor.authorVan Look, Lieve
dc.contributor.authorMaslow, Mark John
dc.contributor.imecauthorKovalevich, Tatiana
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2023-06-09T08:15:51Z
dc.date.available2022-12-11T03:11:07Z
dc.date.available2023-03-16T13:03:21Z
dc.date.available2023-06-09T08:15:51Z
dc.date.embargo2022-12-31
dc.date.issued2022
dc.identifier.doi10.1117/12.2640808
dc.identifier.eisbn978-1-5106-6050-2
dc.identifier.isbn978-1-5106-6049-6
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40859
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 124720H
dc.source.conference37th European Mask and Lithography Conference
dc.source.conferencedate2022-06-20
dc.source.conferencelocationLeuven
dc.source.journalProceedings of SPIE
dc.source.numberofpages6
dc.title

Spatial frequency breakdown of CD variation

dc.typeProceedings paper
dspace.entity.typePublication
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