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Browsing by Author "Rispens, G."

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    Tone reversal patterning for advanced technology nodes

    Schleicher, Filip  
    ;
    Bekaert, Joost  
    ;
    Thiam, Arame  
    ;
    Decoster, Stefan  
    ;
    Blanc, Romuald  
    Proceedings paper
    2022, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XI Part of SPIE Advanced Lithography and Patterning Conference, APR 24-MAY 27, 2020-2022, p.1205605

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