Publication:

Tone reversal patterning for advanced technology nodes

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2610941
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 2.67 MB

Author(s)

Schleicher, Filip  
;
Bekaert, Joost  
;
Thiam, Arame  
;
Decoster, Stefan  
;
Blanc, Romuald  
;
Lazzarino, Frederic  
;
Santaclara, J. Garcia
;
Rispens, G.
;
Maslow, M.

Journal

Proceedings of SPIE

Abstract

Description

Metrics

Downloads

100 since deposited on 2022-09-08
Acq. date: 2025-10-26

Views

1451 since deposited on 2022-09-08
Acq. date: 2025-10-26

Citations

Metrics

Downloads

100 since deposited on 2022-09-08
Acq. date: 2025-10-26

Views

1451 since deposited on 2022-09-08
Acq. date: 2025-10-26

Citations