Tone reversal patterning for advanced technology nodes

Schleicher, Filip; Bekaert, Joost; Thiam, Arame; Decoster, Stefan; Blanc, Romuald; Lazzarino, Frederic; Santaclara, J. Garcia; Rispens, G.; Maslow, M.

doi:10.1117/12.2610941

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Tone reversal patterning for advanced technology nodes

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2610941

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Santaclara, J. Garcia

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Rispens, G.

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Maslow, M.

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Proceedings of SPIE

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Tone reversal patterning for advanced technology nodes

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