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Browsing by Author "Robertson, Stewart A."

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    Impact of mask three dimensional effects on resist-model calibration

    De Bisschop, Peter  
    ;
    Muelders, Thomas
    ;
    Klostermann, Ulrich
    ;
    Schmoeller, Thomas
    ;
    Biafore, John
    Journal article
    2009, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3 Letters), (8) 3, p.30501

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