Browsing by Author "Roeckerath, Martin"
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Publication Growth of dysprosium-, scandium-, and hafnium-based third generation high-k dielectrics by atomic-vapor deposition
Journal article2007-10, Chemical Vapor Deposition, 13, p.567-573Publication Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications
Journal article2007, Journal of the Electrochemical Society, (154) 7, p.G147-G154