Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Rollins, Greg"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Interactions of double patterning technology with wafer processing, OPC and design flows

    Lucas, Kevin
    ;
    Cork, Chris
    ;
    Miloslavsky, Alex
    ;
    Luk-Pat, Gerry
    ;
    Barnes, Levi
    ;
    Hapli, John
    Proceedings paper
    2008, Optical Microlithography XXI, 24/02/2008, p.692403

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings