Browsing by Author "Rollins, Greg"
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Publication Interactions of double patterning technology with wafer processing, OPC and design flows
;Lucas, Kevin ;Cork, Chris ;Miloslavsky, Alex ;Luk-Pat, Gerry ;Barnes, LeviHapli, JohnProceedings paper2008, Optical Microlithography XXI, 24/02/2008, p.692403