Browsing by Author "Rosenbusch, A."
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Publication Application of a new approach to optical proximity correction
Publication Hierarchical E-beam proximity correction in mask making
Proceedings paper1996, Electrtron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, 11/03/1996, p.150-158Publication New approach to optical proximity correction