Browsing by Author "Ross, I.M."
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Publication Assessment of the near-surface profiling capabilities of SIMS
Meeting abstract2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.165Publication TEM analysis of Si-passivated Ge-on-Si MOSFET structures for high performance PMOS device technology