TEM analysis of Si-passivated Ge-on-Si MOSFET structures for high performance PMOS device technology

Norris, D.J.; Ross, I.M.; Cullis, A.G.; Walther, T.; Myronov, M.; Dobbie, A.; Whall, T.; Parker, E.H.C.; Leadley, D.R.; De Jaeger, Brice; Lee, Willie; Meuris, Marc

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TEM analysis of Si-passivated Ge-on-Si MOSFET structures for high performance PMOS device technology

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2010

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Journal of Physics Conference Series

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TEM analysis of Si-passivated Ge-on-Si MOSFET structures for high performance PMOS device technology

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