Browsing by Author "Rothwell, W. J."
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Publication An Advanced Calibration Method for Modelling Oxidation and Mechanical Stress in Sub-Micron CMOS Isolation Structures
Proceedings paper1994, International Electron Devices Meeting (IEDM). Technical Digest, 11/12/1994, p.877-880Publication Characterisation of mechanical stress in advanced PBL isolation
Proceedings paper1994, 24th European Solid State Device Research Conference - ESSDERC, 11/09/1994, p.255-258Publication Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling
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