Browsing by Author "Roze, Fabien"
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Publication Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis
Publication UV nanosecond laser annealing for Ru interconnects
Proceedings paper2020, 23rd IEEE INternational Interconnect Technology Conference - IITC, 5/10/2020, p.FrBT2.6