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Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Publication:
Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Date
2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154669
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lu, Lu
;
Jourdan, Nicolas
;
Daubriac, Richard
;
Tabata, Toshiyuki
;
Roze, Fabien
;
Thuries, Louis
;
Cristiano, Fuccio
;
Tokei, Zsolt
Journal
na
Abstract
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983
since deposited on 2023-08-07
Acq. date: 2025-10-24
Citations
Metrics
Views
983
since deposited on 2023-08-07
Acq. date: 2025-10-24
Citations