Publication:

Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path

Date

2023

Proceedings Paper

https://doi.org/10.1109/IITC/MAM57687.2023.10154669

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Author(s)

;

Jourdan, Nicolas

;

Daubriac, Richard

;

Tabata, Toshiyuki

;

;

;

Cristiano, Fuccio

;

Journal

na

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989 since deposited on 2023-08-07

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Acq. date: 2026-04-05