Publication:

Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path

Date

2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154669
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dc.contributor.authorLu, Lu
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorDaubriac, Richard
dc.contributor.authorTabata, Toshiyuki
dc.contributor.authorRoze, Fabien
dc.contributor.authorThuries, Louis
dc.contributor.authorCristiano, Fuccio
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecJourdan, Nicolas::0009-0005-4798-1736
dc.date.accessioned2023-12-18T11:47:53Z
dc.date.available2023-08-07T17:07:38Z
dc.date.available2023-12-18T11:47:53Z
dc.date.issued2023
dc.description.wosFundingTextThis project has received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel. The project has also received funding from the French PSPC project IT2-FR.
dc.identifier.doi10.1109/IITC/MAM57687.2023.10154669
dc.identifier.eisbn979-8-3503-1097-9
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42298
dc.publisherIEEE
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM)
dc.source.conferencedateMAY 22-25, 2023
dc.source.conferencelocationDresden
dc.source.journalna
dc.source.numberofpages3
dc.title

Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path

dc.typeProceedings paper
dspace.entity.typePublication
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