Browsing by Author "Rudenko, K."

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Cryogenic etching of porous low-k dielectrics in CF3Br plasma

Rezvanov, Askar
;
Miakonkikh, A.
;
Vishnevskiy, A.
;
Gitshin, O.
;
Rudenko, K.
;
Baklanov, Mikhaïl
Oral presentation
2016, Materials for Advanced Metallization conference - MAM
Investigation of plasma damage of low-k dielectrics during cryogenic etching

Rezvanov, A.
;
Miakonkikh, A.
;
Vishnevsky, A.
;
Gutshin, O.
;
Gornev, E.
;
Krasnikov, G.
Proceedings paper
2015, Microelectronics - 2015, 28/09/2015