Browsing by Author "Ruzyllo, Jerzy"
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Publication Advanced wet and dry cleaning coming together for next generation
Journal article1999, Solid State Technology, (42) 3, p.37-47Publication Fluorine in thermal oxides from HF preoxidation surface treatments
Journal article1999, Electrochemical and Solid State Letters, (2) 7, p.336-338Publication Gas-phase surface proessing prior to 3.2nm gate oxidation
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Gas-phase surface proessing prior to 3.2nm gate oxidation
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.85-88Publication Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.233-236