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Gas-phase surface proessing prior to 3.2nm gate oxidation
Publication:
Gas-phase surface proessing prior to 3.2nm gate oxidation
Date
1999
Proceedings Paper
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3754.pdf
370.29 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ruzyllo, Jerzy
;
Röhr, Erika
;
Baeyens, Martien
;
Bearda, Twan
;
Mertens, Paul
;
Heyns, Marc
Journal
Abstract
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1996
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1996
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations