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    The impact of PEALD TaN barrier processes on different ultra low-k dielectrics

    Zhang, Xunyuan
    ;
    Gillot, Christophe
    ;
    Zhao, Larry
    ;
    Ryan, E. Todd
    ;
    Wu, Chen  
    Journal article
    2015, ECS Journal of Solid State Science and Technology, (4) 12, p.N160-N162

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