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    The impact of ALD TaN barrier processes on different BEOL utra low-k dielectrics

    Zhang, Xunyuan
    ;
    Gillot, Christophe
    ;
    Zhao, Larry
    ;
    Ryan, Todd
    ;
    Wu, Chen  
    Meeting abstract
    2015, AVS Topical Conference on Atomic Layer Deposition, 28/06/2015

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