Publication:
The impact of ALD TaN barrier processes on different BEOL utra low-k dielectrics
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1878 since deposited on 2021-10-23
2last month
Acq. date: 2025-12-10
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Metrics
Views
1878 since deposited on 2021-10-23
2last month
Acq. date: 2025-12-10
Citations