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Browsing by Author "Ryu, Heon-Yul"

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    Atomic resolution quality control for Fin oxide recess by atomic resolution profiler

    Kim, Tae-Gon
    ;
    Ryu, Heon-Yul  
    ;
    Kenis, Karine  
    ;
    Jo, Ah-jin
    ;
    Cho, Sang-Joon
    ;
    Park, Sang-il
    Proceedings paper
    2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.304-308
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    Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum

    Ryu, Heon-Yul
    ;
    Teugels, Lieve  
    ;
    Devriendt, Katia  
    ;
    Struyf, Herbert  
    ;
    Kim, Tae-Gon
    ;
    Park, Jin-Goo
    Journal article
    2021, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, (10) 9, p.094001

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