Browsing by Author "Ryu, Heon-Yul"
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Publication Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.304-308Publication Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
Journal article2021, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, (10) 9, p.094001