Browsing by Author "SKJONNEMAND, KARL"
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Publication Roughness study on L/S patterning with chemo
Proceedings paper2019, The 5th DSA symposium, 16/10/2019Publication Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
Proceedings paper2020, Advances in Patterning Materials and Processes XXXVII, 23/02/2020, p.113260X