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Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
Publication:
Roughness study on line and space patterning with chemo-epitaxy directed self-assembly
Date
2020
Proceedings Paper
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43453.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Suh, Hyo Seon
;
Dudash, Viktor
;
Lorusso, Gian
;
Her, YoungJun
;
Li, Jin
;
Monreal, Victor
;
Baskaran, Durairaj
;
ALPERSON, BOAZ
;
SKJONNEMAND, KARL
;
Mack, Chris
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1977
since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1977
since deposited on 2021-10-29
Acq. date: 2025-10-23
Citations