Publication:

Roughness study on line and space patterning with chemo-epitaxy directed self-assembly

Date

2020
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorDudash, Viktor
dc.contributor.authorLorusso, Gian
dc.contributor.authorHer, YoungJun
dc.contributor.authorLi, Jin
dc.contributor.authorMonreal, Victor
dc.contributor.authorBaskaran, Durairaj
dc.contributor.authorALPERSON, BOAZ
dc.contributor.authorSKJONNEMAND, KARL
dc.contributor.authorMack, Chris
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorDudash, Viktor
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorHer, YoungJun
dc.date.accessioned2021-10-29T04:57:42Z
dc.date.available2021-10-29T04:57:42Z
dc.date.embargo9999-12-31
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36029
dc.identifier.urlhttps://doi.org/10.1117/12.2552354
dc.source.beginpage113260X
dc.source.conferenceAdvances in Patterning Materials and Processes XXXVII
dc.source.conferencedate23/02/2020
dc.source.conferencelocationSan Jose, CA California
dc.title

Roughness study on line and space patterning with chemo-epitaxy directed self-assembly

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
43453.pdf
Size:
771.62 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions