Browsing by Author "Sagi, Kaushik"
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Publication Chemical mechanical polishing of manganese (Mn)-based barrier films in the BEOL interconnects for advanced metallization nodes
Meeting abstract2016, Materials for Advanced Metallization Conference - MAM, 20/03/2016, p.147-148Publication Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films
Journal article2013, ECS Journal of Solid State Science and Technology, (2) 11, p.P445-P451Publication The effect of material texture in the CMP of ruthenium films
Proceedings paper2013, 18th International Symposium on Chemical-Mechanical Planarization - CAMP, 11/08/2013