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Browsing by Author "Salah, Ahmed"

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    A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing

    Pamidighantam, Sayanu
    ;
    Laureyn, Wim
    ;
    Salah, Ahmed
    ;
    Verbist, Agnes
    ;
    Tilmans, Harrie  
    Proceedings paper
    2002, 15th IEEE International Conference on Micro Electro Mechanical Systems, 20/01/2002, p.661-664

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