Publication:
A novel process for fabricating slender and compliant suspended poly Si micro-mechanical structures with sub-micron gap spacing
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1953 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-11
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Metrics
Views
1953 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-11
Citations