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Browsing by Author "San, Tamer"

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    Treshold voltage modulation in FINFET devices through arsenic ion implantation into TiN/HfSiON gate stack

    Witters, Liesbeth  
    ;
    Son, Nak Jin
    ;
    Ferain, Isabelle
    ;
    San, Tamer
    ;
    Singanamalla, Raghunath
    Proceedings paper
    2007-10, IEEE International SOI Conference, 1/10/2007, p.31-32

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