Browsing by Author "Sangghaleh, Mahtab"
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Publication Electrical test demonstration for 0.55 NA EUV single patterning damascene process
Proceedings paper2025, IEEE International Interconnect Technology Conference (IITC), 2025-06-02Publication High NA: Enabling Single Exposure for Metal Logic Designs
Proceedings paper2026, Optical and EUV Nanolithography XXXIX,, 2026-02-22, p.139791EPublication Imaging roadmap for high-NA EUV: Paving the way to single-patterning of metal logic for future nodes
Proceedings paper2026, Optical and EUV Nanolithography XXXIX, 2026-02-22, p.139791JPublication Moore's Law meets High-NA EUV: Random via patterning for next-generation nodes
Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-22, p.1342412-1-1342412-7