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Browsing by Author "Santoro, G"

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    Influence of ultra low-k material properties on post direct CMP damage

    Sinapi, Fabrice
    ;
    Travaly, Youssef
    ;
    Heylen, Nancy  
    ;
    Vereecke, Guy  
    ;
    Baklanov, Mikhaïl
    Meeting abstract
    2007, Advanced Metallization Conference - AMC, 9/10/2007

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