Publication:

Influence of ultra low-k material properties on post direct CMP damage

Date

2007

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

Sinapi, Fabrice

;

Travaly, Youssef

;

;

;

Baklanov, Mikhaïl

;

Hernandez, Jose Luis

;

;

;

;

;

;

Statistics

1936 since deposited on 2021-10-16

1last month

Acq. date: 2026-01-26