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Influence of ultra low-k material properties on post direct CMP damage
Publication:
Influence of ultra low-k material properties on post direct CMP damage
Date
2007
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sinapi, Fabrice
;
Travaly, Youssef
;
Heylen, Nancy
;
Vereecke, Guy
;
Baklanov, Mikhaïl
;
Hernandez, Jose Luis
;
Beyer, Gerald
;
Lytle, S
;
Fischer, P
;
Cockburn, A
;
Santoro, G
;
Nguyen, O
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1932
since deposited on 2021-10-16
433
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1932
since deposited on 2021-10-16
433
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations