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Browsing by Author "Santos, S. D."

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    Publication

    Thermal and plasma treatments for improved (Sub-)1nm EOT RMG high-k last devices

    Veloso, Anabela  
    ;
    Arimura, Hiroaki  
    ;
    Simoen, Eddy  
    ;
    Paraschiv, Vasile  
    ;
    Shi, Xiaoping
    ;
    Cho, Moon Ju
    Meeting abstract
    2012-12, 43rd IEEE Semiconductor Interface Specialists Conference - SISC, 6/12/2012

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