Publication:

Thermal and plasma treatments for improved (Sub-)1nm EOT RMG high-k last devices

Date

2012-12
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Author(s)

Veloso, Anabela  
;
Arimura, Hiroaki  
;
Simoen, Eddy  
;
Paraschiv, Vasile  
;
Shi, Xiaoping
;
Cho, Moon Ju
;
Ragnarsson, Lars-Ake  
;
Chew, Soon Aik
;
Vecchio, Emma  
;
Sebaai, Farid  
;
Roussel, Philippe  
;
Santos, S. D.
;
Schram, Tom  
;
Higuchi, Y.
;
Thean, Aaron  
;
Horiguchi, Naoto  

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1843 since deposited on 2021-10-20
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