Browsing by Author "Sato, M."
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Publication Investigation of time-frequency features for GPR landmine discrimination
Journal article2007, IEEE Trans. Geoscience and Remote Sensing, (45) 1, p.118-129Publication Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatment
Proceedings paper2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.223-226Publication Removal of small (<100-nm) particles and metal contamination in single-wafer cleaning tool
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.157-161Publication Surface preparation and wet cleaning for germanium surface
Proceedings paper2017, Surface Preparation and Cleaning Conference - SPCC, 28/03/2017, p.170-180