Browsing by Author "Sayan, S."
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Publication Gate oxide atomic layer deposition studied by in situ infrared spectroscopy
;Frank, M.M. ;Dörmann, S. ;Chabal, Y.J. ;Sayan, S. ;Garfunkel, E. ;Wilk, G.D.Green, M.L.Oral presentation2003, E-MRS Spring Meeting Symposium I Functional Metal Oxides - Semiconductor Structures