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Browsing by Author "Sayan, S."

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    Gate oxide atomic layer deposition studied by in situ infrared spectroscopy

    Frank, M.M.
    ;
    Dörmann, S.
    ;
    Chabal, Y.J.
    ;
    Sayan, S.
    ;
    Garfunkel, E.
    ;
    Wilk, G.D.
    ;
    Green, M.L.
    Oral presentation
    2003, E-MRS Spring Meeting Symposium I Functional Metal Oxides - Semiconductor Structures

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