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Browsing by Author "Schatzer, Philipp"

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    Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

    Mody, Jay
    ;
    Kambham, Ajay Kumar
    ;
    Zschaetzsch, Gerd
    ;
    Schatzer, Philipp
    ;
    Chiarella, Thomas  
    Proceedings paper
    2010, IEEE Symposium on VLSI Technology, 15/06/2010, p.195-196

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