Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

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Author(s)

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Kambham, Ajay Kumar

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Zschaetzsch, Gerd

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Schatzer, Philipp

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Chiarella, Thomas

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Collaert, Nadine

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Witters, Liesbeth

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Horiguchi, Naoto

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Gilbert, Matthieu

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Koelling, Sebastian

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Schulze, Andreas

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Hoffmann, Thomas Y.

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Vandervorst, Wilfried

Metrics

1943 since deposited on 2021-10-18

Acq. date: 2025-10-23