Publication:

Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

Date

2010

Proceedings Paper

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Files

20250.pdf 1.32 MB

Author(s)

;

Kambham, Ajay Kumar

;

Zschaetzsch, Gerd

;

Schatzer, Philipp

;

Chiarella, Thomas

;

Collaert, Nadine

;

Witters, Liesbeth

;

;

Horiguchi, Naoto

;

Gilbert, Matthieu

;

;

Koelling, Sebastian

;

Schulze, Andreas

;

Hoffmann, Thomas Y.

;

Vandervorst, Wilfried

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