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Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

Date

2010
Proceedings Paper
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dc.contributor.authorMody, Jay
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorSchatzer, Philipp
dc.contributor.authorChiarella, Thomas
dc.contributor.authorCollaert, Nadine
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorJurczak, Gosia
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorEyben, Pierre
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorSchulze, Andreas
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2021-10-18T19:15:50Z
dc.date.available2021-10-18T19:15:50Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17648
dc.source.beginpage195
dc.source.conferenceIEEE Symposium on VLSI Technology
dc.source.conferencedate15/06/2010
dc.source.conferencelocationHonolulu, HI US
dc.source.endpage196
dc.title

Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

dc.typeProceedings paper
dspace.entity.typePublication
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